The aim of this course is to know the be know how to model electrostatic sensors and to know the principles for building micro sensors.
Lumped elements modeling of transducers.
Accelerometers (operating principles, piezoelectric accelerometers, piezoresistive accelerometers).
Ultrasonic sensors for NDE (principle of operation of transducers, passing interface, ultrasonic NDT).
Microphones (recall basic structures of microphones, common characteristics, principles of transduction)
MEMs microphones (micro - manufacturing principles, method of making a MEM's microphone, electroacoustic model)
Crédits ECTS 3
Nombre d'heures 20 HE